High temperature absolute pressure sensors, M5 (0 … 5 to 0 … 250 bar) / 4007D

The piezoresistive pressure sensor series of Type 4007D is a small, rugged high accuracy sensor family capable of continuous high temperature operation up to 200°C. The pressure transducers use a fully active Wheatstone bridge to generate an electrical signal, which is proportional to the applied pressure. The resistors making up the Wheatstone bridge are implanted into a micromachined silicon diaphragm which is formed using Silicon on Insulator (SOI) technology. This approach, coupled with Kistler's DCE method of sensor construction, allows the sensors to be exposed to media temperatures up to 200°C while minimizing hysteresis and repeatability errors. Further performance improvements are made using digital compensation techniques whereby, the effects of zero offset and sensitivity changes due to temperature can be reduced without sacrificing signal bandwidth. The digital compensation technique further allows a monitoring of the sensor temperature (e.g. with amplifiers of Type 4665B and 4624A).