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Piezoelectric sensor, longitudinal strain measuring pin (M5) for cavity and injection pressure / 9247A

Piezoelectric sensor, longitudinal strain measuring pin (M5) for cavity and injection pressure
9247A
18007508
  • Piezoelectric sensor, measuring range (axial): –1400 … 1400 με
  • Nominal sensitivity: –8.6 pC/με
  • Dimensions: DxL (mm) M5x0.5x23
  • Output connection: M4x0.35 neg.
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Measuring ranges
Measuring range [µε]
-1400 … 1400 με
Product type
Strain sensor type
Longitudinal strain measuring pin
Mechanical properties
Preload force
3.3 kN
Range with preload
–1400 ... 1400 με
Axial preloading force pC
≈–20000 pC
Force sensitivity for preload
-6 pC/N
Overload
±2000 με
Metrological characteristics
Linearity
Linearity represents the maximum deviation/error between ideal and actual output signal characteristics in relation to the measurand in a specific measuring range. It is expressed in percentage of the range of measurement signal (Full Scale Output).
≤±2 %FSO
Hysteresis
≤3 %FSO
Repeatability of sensitivity after demounting and remounting
–1,1%
Electrical properties
Output signal type
Charge (Piezoelectric, PE)
Minimal insulation resistance
10^13 Ω
Influence quantities
Sensitivity in test object
≈–8.6 pC/με
Maximal acceleration sensitivity
0.07 pC/g
Certificates and Standards
Degree of protection EN 60529
IP65
Operation and installation
Operating temperature range
-40 … 200 °C
Applications
Semiconductor manufacturing
Cable properties
Cable included
No cable included
Interfaces
Connector type
M4 (negative)
Dimensions and materials
Weight (without cable)
2.5 g
Weight without cable and preloading bolt
2.5 g
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